Application of 1D ResNet for Multivariate Fault Detection on Semiconductor Manufacturing Equipment.

Tchatchoua P, Graton G, Ouladsine M, Christaud JF

DOI: 10.3390/s23229099
Published: 2023 Nov 10
Container: Sensors (Basel, Switzerland)
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/s23229099,
  title = {Application of 1D ResNet for Multivariate Fault Detection on Semiconductor Manufacturing Equipment.},
  author = {Tchatchoua P and Graton G and Ouladsine M and Christaud JF},
  year = {2023},
  journal = {Sensors (Basel, Switzerland)},
  doi = {10.3390/s23229099},
  url = {https://doi.org/10.3390/s23229099}
}

RIS

TY  - JOUR
TI  - Application of 1D ResNet for Multivariate Fault Detection on Semiconductor Manufacturing Equipment.
AU  - Tchatchoua P
AU  - Graton G
AU  - Ouladsine M
AU  - Christaud JF
PY  - 2023
JO  - Sensors (Basel, Switzerland)
DO  - 10.3390/s23229099
UR  - https://doi.org/10.3390/s23229099
ER  -

APA

P, T., G, G., M, O., & JF, C. (2023). Application of 1D ResNet for Multivariate Fault Detection on Semiconductor Manufacturing Equipment.. Sensors (Basel, Switzerland). https://doi.org/10.3390/s23229099

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pubmed · retrieved 2026-09-25T08:00:39.409Z