Computational Adaptive Optics for HAR Hybrid Trench Array Topography Measurement by Utilizing Coherence Scanning Interferometry.

Qiao W, Gao Z, Yuan Q, Chen L, Guo Z, Huo X, Wang Q

DOI: 10.3390/s25134085
Published: 2025 Jun 30
Container: Sensors (Basel, Switzerland)
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/s25134085,
  title = {Computational Adaptive Optics for HAR Hybrid Trench Array Topography Measurement by Utilizing Coherence Scanning Interferometry.},
  author = {Qiao W and Gao Z and Yuan Q and Chen L and Guo Z and Huo X and Wang Q},
  year = {2025},
  journal = {Sensors (Basel, Switzerland)},
  doi = {10.3390/s25134085},
  url = {https://doi.org/10.3390/s25134085}
}

RIS

TY  - JOUR
TI  - Computational Adaptive Optics for HAR Hybrid Trench Array Topography Measurement by Utilizing Coherence Scanning Interferometry.
AU  - Qiao W
AU  - Gao Z
AU  - Yuan Q
AU  - Chen L
AU  - Guo Z
AU  - Huo X
AU  - Wang Q
PY  - 2025
JO  - Sensors (Basel, Switzerland)
DO  - 10.3390/s25134085
UR  - https://doi.org/10.3390/s25134085
ER  -

APA

W, Q., Z, G., Q, Y., L, C., Z, G., X, H., & Q, W. (2025). Computational Adaptive Optics for HAR Hybrid Trench Array Topography Measurement by Utilizing Coherence Scanning Interferometry.. Sensors (Basel, Switzerland). https://doi.org/10.3390/s25134085

Source records

pubmed · retrieved 2026-11-10T07:12:25.823Z