Sensitivity Improvement of MEMS Resonant Accelerometers by Shape Optimization of Microlevers and Resonators

Longqi Ran, Wensheng Zhao, Ting Li, Jiangbo He, Wu Zhou

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DOI: 10.3390/s25216807
Published: 2025-11-06
Container: Sensors
Publisher: MDPI AG
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.3390/s25216807,
  title = {Sensitivity Improvement of MEMS Resonant Accelerometers by Shape Optimization of Microlevers and Resonators},
  author = {Longqi Ran and Wensheng Zhao and Ting Li and Jiangbo He and Wu Zhou},
  year = {2025},
  journal = {Sensors},
  doi = {10.3390/s25216807},
  url = {https://doi.org/10.3390/s25216807}
}

RIS

TY  - JOUR
TI  - Sensitivity Improvement of MEMS Resonant Accelerometers by Shape Optimization of Microlevers and Resonators
AU  - Longqi Ran
AU  - Wensheng Zhao
AU  - Ting Li
AU  - Jiangbo He
AU  - Wu Zhou
PY  - 2025
JO  - Sensors
DO  - 10.3390/s25216807
UR  - https://doi.org/10.3390/s25216807
ER  -

APA

Ran, L., Zhao, W., Li, T., He, J., & Zhou, W. (2025). Sensitivity Improvement of MEMS Resonant Accelerometers by Shape Optimization of Microlevers and Resonators. Sensors. https://doi.org/10.3390/s25216807

Source records

crossref · retrieved 2026-09-25T01:18:14.773Z