Phase Measuring Deflectometry for Wafer Thin-Film Stress Mapping

Yang Gao, Xinjun Wan, Kunying Hsin, Jiaqing Tao, Zhuoyi Yin, Fujun Yang

Open source

DOI: 10.3390/s25247668
Published: 2025-12-18
Container: Sensors
Publisher: MDPI AG
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.3390/s25247668,
  title = {Phase Measuring Deflectometry for Wafer Thin-Film Stress Mapping},
  author = {Yang Gao and Xinjun Wan and Kunying Hsin and Jiaqing Tao and Zhuoyi Yin and Fujun Yang},
  year = {2025},
  journal = {Sensors},
  doi = {10.3390/s25247668},
  url = {https://doi.org/10.3390/s25247668}
}

RIS

TY  - JOUR
TI  - Phase Measuring Deflectometry for Wafer Thin-Film Stress Mapping
AU  - Yang Gao
AU  - Xinjun Wan
AU  - Kunying Hsin
AU  - Jiaqing Tao
AU  - Zhuoyi Yin
AU  - Fujun Yang
PY  - 2025
JO  - Sensors
DO  - 10.3390/s25247668
UR  - https://doi.org/10.3390/s25247668
ER  -

APA

Gao, Y., Wan, X., Hsin, K., Tao, J., Yin, Z., & Yang, F. (2025). Phase Measuring Deflectometry for Wafer Thin-Film Stress Mapping. Sensors. https://doi.org/10.3390/s25247668

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crossref · retrieved 2026-09-27T16:45:12.635Z