Time dependent exposure effects in thin film semiconductor technology

Horn, Philipp

DOI: 10.34726/hss.2026.139103
Published: 2026
Container: Not recorded
Publisher: TU Wien
Open access: no

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Cite this work

BibTeX

@article{allodium:10.34726/hss.2026.139103,
  title = {Time dependent exposure effects in thin film semiconductor technology},
  author = {Horn, Philipp},
  year = {2026},
  doi = {10.34726/hss.2026.139103},
  url = {https://doi.org/10.34726/hss.2026.139103}
}

RIS

TY  - JOUR
TI  - Time dependent exposure effects in thin film semiconductor technology
AU  - Horn, Philipp
PY  - 2026
DO  - 10.34726/hss.2026.139103
UR  - https://doi.org/10.34726/hss.2026.139103
ER  -

APA

Philipp, H. (2026). Time dependent exposure effects in thin film semiconductor technology. https://doi.org/10.34726/hss.2026.139103

Source records

datacite · retrieved 2026-11-10T11:21:23.066Z