Kinetics of thermal oxidation of silicon

Takanobu Watanabe

Open source

DOI: 10.35848/1882-0786/ae1f5b
Published: 2025-12-01
Container: Applied Physics Express
Publisher: IOP Publishing
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.35848/1882-0786/ae1f5b,
  title = {Kinetics of thermal oxidation of silicon},
  author = {Takanobu Watanabe},
  year = {2025},
  journal = {Applied Physics Express},
  doi = {10.35848/1882-0786/ae1f5b},
  url = {https://doi.org/10.35848/1882-0786/ae1f5b}
}

RIS

TY  - JOUR
TI  - Kinetics of thermal oxidation of silicon
AU  - Takanobu Watanabe
PY  - 2025
JO  - Applied Physics Express
DO  - 10.35848/1882-0786/ae1f5b
UR  - https://doi.org/10.35848/1882-0786/ae1f5b
ER  -

APA

Watanabe, T. (2025). Kinetics of thermal oxidation of silicon. Applied Physics Express. https://doi.org/10.35848/1882-0786/ae1f5b

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crossref · retrieved 2026-11-10T10:22:10.986Z