Low temperature atomic layer deposition of cobalt using dicobalt hexacarbonyl-1-heptyne as precursor

Mathias Franz, Mahnaz Safian Jouzdani, Lysann Kaßner, Marcus Daniel, Frank Stahr, Stefan E Schulz

Open source

DOI
10.3762/bjnano.14.78
Published
2023-09-15
Container
Beilstein Journal of Nanotechnology
Publisher
Beilstein Institut
Open access
unknown

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BibTeX

@article{allodium:10.3762/bjnano.14.78,
  title = {Low temperature atomic layer deposition of cobalt using dicobalt hexacarbonyl-1-heptyne as precursor},
  author = {Mathias Franz and Mahnaz Safian Jouzdani and Lysann Kaßner and Marcus Daniel and Frank Stahr and Stefan E Schulz},
  year = {2023},
  journal = {Beilstein Journal of Nanotechnology},
  doi = {10.3762/bjnano.14.78},
  url = {https://doi.org/10.3762/bjnano.14.78}
}

RIS

TY  - JOUR
TI  - Low temperature atomic layer deposition of cobalt using dicobalt hexacarbonyl-1-heptyne as precursor
AU  - Mathias Franz
AU  - Mahnaz Safian Jouzdani
AU  - Lysann Kaßner
AU  - Marcus Daniel
AU  - Frank Stahr
AU  - Stefan E Schulz
PY  - 2023
JO  - Beilstein Journal of Nanotechnology
DO  - 10.3762/bjnano.14.78
UR  - https://doi.org/10.3762/bjnano.14.78
ER  - 

APA

Franz, M., Jouzdani, M. S., Kaßner, L., Daniel, M., Stahr, F., & Schulz, S. E. (2023). Low temperature atomic layer deposition of cobalt using dicobalt hexacarbonyl-1-heptyne as precursor. Beilstein Journal of Nanotechnology. https://doi.org/10.3762/bjnano.14.78

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