Precise in situ etch depth control of multilayered III−V semiconductor samples with reflectance anisotropy spectroscopy (RAS) equipment

Ann-Kathrin Kleinschmidt, Lars Barzen, Johannes Strassner, Christoph Doering, Henning Fouckhardt, Wolfgang Bock, Michael Wahl, Michael Kopnarski

Open source

DOI
10.3762/bjnano.7.171
Published
2016-11-21
Container
Beilstein Journal of Nanotechnology
Publisher
Beilstein Institut
Open access
unknown

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BibTeX

@article{allodium:10.3762/bjnano.7.171,
  title = {Precise in situ etch depth control of multilayered III−V semiconductor samples with reflectance anisotropy spectroscopy (RAS) equipment},
  author = {Ann-Kathrin Kleinschmidt and Lars Barzen and Johannes Strassner and Christoph Doering and Henning Fouckhardt and Wolfgang Bock and Michael Wahl and Michael Kopnarski},
  year = {2016},
  journal = {Beilstein Journal of Nanotechnology},
  doi = {10.3762/bjnano.7.171},
  url = {https://doi.org/10.3762/bjnano.7.171}
}

RIS

TY  - JOUR
TI  - Precise in situ etch depth control of multilayered III−V semiconductor samples with reflectance anisotropy spectroscopy (RAS) equipment
AU  - Ann-Kathrin Kleinschmidt
AU  - Lars Barzen
AU  - Johannes Strassner
AU  - Christoph Doering
AU  - Henning Fouckhardt
AU  - Wolfgang Bock
AU  - Michael Wahl
AU  - Michael Kopnarski
PY  - 2016
JO  - Beilstein Journal of Nanotechnology
DO  - 10.3762/bjnano.7.171
UR  - https://doi.org/10.3762/bjnano.7.171
ER  - 

APA

Kleinschmidt, A., Barzen, L., Strassner, J., Doering, C., Fouckhardt, H., Bock, W., Wahl, M., & Kopnarski, M. (2016). Precise in situ etch depth control of multilayered III−V semiconductor samples with reflectance anisotropy spectroscopy (RAS) equipment. Beilstein Journal of Nanotechnology. https://doi.org/10.3762/bjnano.7.171

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