Investigation into Deformation of Three-Dimensional Microstructures via Surface Tension of a Rinsing Material During a Developing Process
- DOI
- 10.3795/ksme-a.2008.32.4.303
- Published
- 2008-04-01
- Container
- Transactions of the Korean Society of Mechanical Engineers A
- Publisher
- The Korean Society of Mechanical Engineers
- Open access
- unknown
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uncertain Score 64/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.
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Cite this work
BibTeX
@article{allodium:10.3795/ksme-a.2008.32.4.303,
title = {Investigation into Deformation of Three-Dimensional Microstructures via Surface Tension of a Rinsing Material During a Developing Process},
author = {Sang-Hu Park and Dong-Yol Yang},
year = {2008},
journal = {Transactions of the Korean Society of Mechanical Engineers A},
doi = {10.3795/ksme-a.2008.32.4.303},
url = {https://doi.org/10.3795/ksme-a.2008.32.4.303}
}RIS
TY - JOUR TI - Investigation into Deformation of Three-Dimensional Microstructures via Surface Tension of a Rinsing Material During a Developing Process AU - Sang-Hu Park AU - Dong-Yol Yang PY - 2008 JO - Transactions of the Korean Society of Mechanical Engineers A DO - 10.3795/ksme-a.2008.32.4.303 UR - https://doi.org/10.3795/ksme-a.2008.32.4.303 ER -
APA
Park, S., & Yang, D. (2008). Investigation into Deformation of Three-Dimensional Microstructures via Surface Tension of a Rinsing Material During a Developing Process. Transactions of the Korean Society of Mechanical Engineers A. https://doi.org/10.3795/ksme-a.2008.32.4.303
Source records
- crossref · retrieved 2026-09-27T10:27:38.499Z