Investigation into Deformation of Three-Dimensional Microstructures via Surface Tension of a Rinsing Material During a Developing Process

Sang-Hu Park, Dong-Yol Yang

Open source

DOI
10.3795/ksme-a.2008.32.4.303
Published
2008-04-01
Container
Transactions of the Korean Society of Mechanical Engineers A
Publisher
The Korean Society of Mechanical Engineers
Open access
unknown

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BibTeX

@article{allodium:10.3795/ksme-a.2008.32.4.303,
  title = {Investigation into Deformation of Three-Dimensional Microstructures via Surface Tension of a Rinsing Material During a Developing Process},
  author = {Sang-Hu Park and Dong-Yol Yang},
  year = {2008},
  journal = {Transactions of the Korean Society of Mechanical Engineers A},
  doi = {10.3795/ksme-a.2008.32.4.303},
  url = {https://doi.org/10.3795/ksme-a.2008.32.4.303}
}

RIS

TY  - JOUR
TI  - Investigation into Deformation of Three-Dimensional Microstructures via Surface Tension of a Rinsing Material During a Developing Process
AU  - Sang-Hu Park
AU  - Dong-Yol Yang
PY  - 2008
JO  - Transactions of the Korean Society of Mechanical Engineers A
DO  - 10.3795/ksme-a.2008.32.4.303
UR  - https://doi.org/10.3795/ksme-a.2008.32.4.303
ER  - 

APA

Park, S., & Yang, D. (2008). Investigation into Deformation of Three-Dimensional Microstructures via Surface Tension of a Rinsing Material During a Developing Process. Transactions of the Korean Society of Mechanical Engineers A. https://doi.org/10.3795/ksme-a.2008.32.4.303

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