Laser fabrication of vibrating microcavities on silicon: Formation dynamics and frequency tunability

Valiente, Belen, Gomez-Munoz, Gonzalo, Garcia-Lechuga, Mario, Solana, Irene, Agulló-Rueda, Fernando, Grojo, David, Rodriguez-Fernandez, Angel, Solis, Javier, Siegel, Jan

Open source

DOI
10.48550/arxiv.2611.07742
Published
2026
Container
Not recorded
Publisher
arXiv
Open access
yes

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BibTeX

@article{allodium:10.48550/arxiv.2611.07742,
  title = {Laser fabrication of vibrating microcavities on silicon: Formation dynamics and frequency tunability},
  author = {Valiente, Belen and Gomez-Munoz, Gonzalo and Garcia-Lechuga, Mario and Solana, Irene and Agulló-Rueda, Fernando and Grojo, David and Rodriguez-Fernandez, Angel and Solis, Javier and Siegel, Jan},
  year = {2026},
  doi = {10.48550/arxiv.2611.07742},
  url = {https://doi.org/10.48550/arxiv.2611.07742}
}

RIS

TY  - JOUR
TI  - Laser fabrication of vibrating microcavities on silicon: Formation dynamics and frequency tunability
AU  - Valiente, Belen
AU  - Gomez-Munoz, Gonzalo
AU  - Garcia-Lechuga, Mario
AU  - Solana, Irene
AU  - Agulló-Rueda, Fernando
AU  - Grojo, David
AU  - Rodriguez-Fernandez, Angel
AU  - Solis, Javier
AU  - Siegel, Jan
PY  - 2026
DO  - 10.48550/arxiv.2611.07742
UR  - https://doi.org/10.48550/arxiv.2611.07742
ER  - 

APA

Belen, V., Gonzalo, G., Mario, G., Irene, S., Fernando, A., David, G., Angel, R., Javier, S., & Jan, S. (2026). Laser fabrication of vibrating microcavities on silicon: Formation dynamics and frequency tunability. https://doi.org/10.48550/arxiv.2611.07742

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