Micromachined tunable devices based on silicon integrated BaxSr1-xTiO3 thin films : concepts, fabrication and characterization

Nöth, Andreas

DOI: 10.5075/epfl-thesis-4284
Published: 2009
Container: Not recorded
Publisher: Lausanne, EPFL
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.5075/epfl-thesis-4284,
  title = {Micromachined tunable devices based on silicon integrated BaxSr1-xTiO3 thin films : concepts, fabrication and characterization},
  author = {Nöth, Andreas},
  year = {2009},
  doi = {10.5075/epfl-thesis-4284},
  url = {https://doi.org/10.5075/epfl-thesis-4284}
}

RIS

TY  - JOUR
TI  - Micromachined tunable devices based on silicon integrated BaxSr1-xTiO3 thin films : concepts, fabrication and characterization
AU  - Nöth, Andreas
PY  - 2009
DO  - 10.5075/epfl-thesis-4284
UR  - https://doi.org/10.5075/epfl-thesis-4284
ER  -

APA

Andreas, N. (2009). Micromachined tunable devices based on silicon integrated BaxSr1-xTiO3 thin films : concepts, fabrication and characterization. https://doi.org/10.5075/epfl-thesis-4284

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