Large Hybrid High Precision MEMS Mirrors

Bayat, Dara

DOI: 10.5075/epfl-thesis-5152
Published: 2011
Container: Not recorded
Publisher: Lausanne, EPFL
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.5075/epfl-thesis-5152,
  title = {Large Hybrid High Precision MEMS Mirrors},
  author = {Bayat, Dara},
  year = {2011},
  doi = {10.5075/epfl-thesis-5152},
  url = {https://doi.org/10.5075/epfl-thesis-5152}
}

RIS

TY  - JOUR
TI  - Large Hybrid High Precision MEMS Mirrors
AU  - Bayat, Dara
PY  - 2011
DO  - 10.5075/epfl-thesis-5152
UR  - https://doi.org/10.5075/epfl-thesis-5152
ER  -

APA

Dara, B. (2011). Large Hybrid High Precision MEMS Mirrors. https://doi.org/10.5075/epfl-thesis-5152

Source records

datacite · retrieved 2026-09-25T04:54:09.635Z