Concept for a MEMS-type vacuum sensor based on electrical conductivity measurements

F. J. Giebel, M. Köhle, T. Stramm, K. T. Kallis, H. L. Fiedler

Open source

DOI: 10.5194/jsss-6-367-2017
Published: 11
Container: Journal of Sensors and Sensor Systems
Publisher: Not recorded
Open access: yes

Credibility signals

uncertain Score 53/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.

Show all credibility signals

cautionDOI registered: No matching Crossref record was present in this response. Source: Crossref; license: CC0 metadata
cautionDOI resolves: No matching Crossref record was present in this response. Source: Crossref; license: CC0 metadata
supportingDirectory of Open Access Journals: A matching record was returned by DOAJ. Source: DOAJ; license: CC0
not scoredMEDLINE indexed: Not checked or no result supplied; no credibility inference made. Source: No authority result supplied; license: Unknown
not scoredOpenAlex core source: Not checked or no result supplied; no credibility inference made. Source: No authority result supplied; license: Unknown
not scoredKnown publisher allow-list: Not checked or no result supplied; no credibility inference made. Source: No authority result supplied; license: Unknown
not scoredROR affiliation: Not checked or no result supplied; no credibility inference made. Source: No authority result supplied; license: Unknown
not scoredRetraction Watch retraction: No retraction notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete. Source: Retraction Watch; license: CC BY 4.0
not scoredRetraction Watch expression of concern: No expression of concern notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete. Source: Retraction Watch; license: CC BY 4.0
not scoredRetraction Watch correction: No correction notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete. Source: Retraction Watch; license: CC BY 4.0
not scoredRetraction Watch reinstatement: No reinstatement notice matched this DOI in the deployed snapshot. No matching event found; coverage may be incomplete. Source: Retraction Watch; license: CC BY 4.0
supportingOpen access status: Normalized open-access status: open. Source: Normalized work metadata; license: Caller-provided; provenance license not supplied to scorer
not scoredPublication license: Not checked or no result supplied; no credibility inference made. Source: No authority result supplied; license: Unknown
not scoredPublication version: A publication version was supplied but is not scored. Source: Normalized work metadata; license: Caller-provided; provenance license not supplied to scorer
cautionMetadata completeness: 5 of 6 scored descriptive metadata groups are present; missing fields increase uncertainty. Source: Normalized work metadata; license: Caller-provided; provenance license not supplied to scorer

Cite this work

BibTeX

@article{allodium:10.5194/jsss-6-367-2017,
  title = {Concept for a MEMS-type vacuum sensor based on electrical conductivity measurements},
  author = {F. J. Giebel and M. Köhle and T. Stramm and K. T. Kallis and H. L. Fiedler},
  year = {2017},
  journal = {Journal of Sensors and Sensor Systems},
  doi = {10.5194/jsss-6-367-2017},
  url = {https://doi.org/10.5194/jsss-6-367-2017}
}

RIS

TY  - JOUR
TI  - Concept for a MEMS-type vacuum sensor based on electrical conductivity measurements
AU  - F. J. Giebel
AU  - M. Köhle
AU  - T. Stramm
AU  - K. T. Kallis
AU  - H. L. Fiedler
PY  - 2017
JO  - Journal of Sensors and Sensor Systems
DO  - 10.5194/jsss-6-367-2017
UR  - https://doi.org/10.5194/jsss-6-367-2017
ER  -

APA

Giebel, F. J., Köhle, M., Stramm, T., Kallis, K. T., & Fiedler, H. L. (2017). Concept for a MEMS-type vacuum sensor based on electrical conductivity measurements. Journal of Sensors and Sensor Systems. https://doi.org/10.5194/jsss-6-367-2017

Source records

doaj · retrieved 2026-09-25T07:52:14.060Z