Atomic Layer Deposition and Etching Process Schemas Extracted with Schema-Miner
- DOI
- 10.5281/zenodo.16413856
- Published
- 2026
- Container
- Not recorded
- Publisher
- Zenodo
- Open access
- yes
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Cite this work
BibTeX
@article{allodium:10.5281/zenodo.16413856,
title = {Atomic Layer Deposition and Etching Process Schemas Extracted with Schema-Miner},
author = {Sadruddin, Sameer and D'Souza, Jennifer and Poupaki, Eleni and Watkins, Alex and Babaei Giglou, Hamed and Rula, Anisa and Karasulu, Bora and Auer, Sören and Mackus, Adriaan and Kessels, Wilhelmus},
year = {2026},
doi = {10.5281/zenodo.16413856},
url = {https://doi.org/10.5281/zenodo.16413856}
}RIS
TY - JOUR TI - Atomic Layer Deposition and Etching Process Schemas Extracted with Schema-Miner AU - Sadruddin, Sameer AU - D'Souza, Jennifer AU - Poupaki, Eleni AU - Watkins, Alex AU - Babaei Giglou, Hamed AU - Rula, Anisa AU - Karasulu, Bora AU - Auer, Sören AU - Mackus, Adriaan AU - Kessels, Wilhelmus PY - 2026 DO - 10.5281/zenodo.16413856 UR - https://doi.org/10.5281/zenodo.16413856 ER -
APA
Sameer, S., Jennifer, D., Eleni, P., Alex, W., Hamed, B. G., Anisa, R., Bora, K., Sören, A., Adriaan, M., & Wilhelmus, K. (2026). Atomic Layer Deposition and Etching Process Schemas Extracted with Schema-Miner. https://doi.org/10.5281/zenodo.16413856