Optical characterization in microelectronics manufacturing

S. Perkowitz, D.G. Seiler, W.M. Duncan

Open source

DOI: 10.6028/jres.099.058
Published: 1994-09
Container: Journal of Research of the National Institute of Standards and Technology
Publisher: National Institute of Standards and Technology (NIST)
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.6028/jres.099.058,
  title = {Optical characterization in microelectronics manufacturing},
  author = {S. Perkowitz and D.G. Seiler and W.M. Duncan},
  year = {1994},
  journal = {Journal of Research of the National Institute of Standards and Technology},
  doi = {10.6028/jres.099.058},
  url = {https://doi.org/10.6028/jres.099.058}
}

RIS

TY  - JOUR
TI  - Optical characterization in microelectronics manufacturing
AU  - S. Perkowitz
AU  - D.G. Seiler
AU  - W.M. Duncan
PY  - 1994
JO  - Journal of Research of the National Institute of Standards and Technology
DO  - 10.6028/jres.099.058
UR  - https://doi.org/10.6028/jres.099.058
ER  -

APA

Perkowitz, S., Seiler, D., & Duncan, W. (1994). Optical characterization in microelectronics manufacturing. Journal of Research of the National Institute of Standards and Technology. https://doi.org/10.6028/jres.099.058

Source records

crossref · retrieved 2026-09-27T05:47:04.705Z