Zero-change foundry compatible silicon photonics MEMS optical switch

Arkadev Roy, Daniel Klawson, Jianheng Luo, Yiyang Zhi, Sirui Tang, Ming Wu

Open source

DOI
10.6084/m9.figshare.c.8788242.v1
Published
2026
Container
Not recorded
Publisher
Optica Publishing Group
Open access
yes

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BibTeX

@article{allodium:10.6084/m9.figshare.c.8788242.v1,
  title = {Zero-change foundry compatible silicon photonics MEMS optical switch},
  author = {Arkadev Roy and Daniel Klawson and Jianheng Luo and Yiyang Zhi and Sirui Tang and Ming Wu},
  year = {2026},
  doi = {10.6084/m9.figshare.c.8788242.v1},
  url = {https://doi.org/10.6084/m9.figshare.c.8788242.v1}
}

RIS

TY  - JOUR
TI  - Zero-change foundry compatible silicon photonics MEMS optical switch
AU  - Arkadev Roy
AU  - Daniel Klawson
AU  - Jianheng Luo
AU  - Yiyang Zhi
AU  - Sirui Tang
AU  - Ming Wu
PY  - 2026
DO  - 10.6084/m9.figshare.c.8788242.v1
UR  - https://doi.org/10.6084/m9.figshare.c.8788242.v1
ER  - 

APA

Roy, A., Klawson, D., Luo, J., Zhi, Y., Tang, S., & Wu, M. (2026). Zero-change foundry compatible silicon photonics MEMS optical switch. https://doi.org/10.6084/m9.figshare.c.8788242.v1

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