Effet de recuits thermiques sur des diélectriques à faible permittivité pour des applications Back-End-of-Line intermédiaire en vue d'une intégration 3D séquentielle

Sylvain Beaurepaire

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DOI: 10.70675/58e107c8ze6fbz49b0zae76z16fa77f946a7
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Publisher: Agence Bibliographique de l'Enseignement Supérieur
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Cite this work

BibTeX

@article{allodium:10.70675/58e107c8ze6fbz49b0zae76z16fa77f946a7,
  title = {Effet de recuits thermiques sur des diélectriques à faible permittivité pour des applications Back-End-of-Line intermédiaire en vue d'une intégration 3D séquentielle},
  author = {Sylvain Beaurepaire},
  doi = {10.70675/58e107c8ze6fbz49b0zae76z16fa77f946a7},
  url = {https://doi.org/10.70675/58e107c8ze6fbz49b0zae76z16fa77f946a7}
}

RIS

TY  - JOUR
TI  - Effet de recuits thermiques sur des diélectriques à faible permittivité pour des applications Back-End-of-Line intermédiaire en vue d'une intégration 3D séquentielle
AU  - Sylvain Beaurepaire
DO  - 10.70675/58e107c8ze6fbz49b0zae76z16fa77f946a7
UR  - https://doi.org/10.70675/58e107c8ze6fbz49b0zae76z16fa77f946a7
ER  -

APA

Beaurepaire, S. (n.d.). Effet de recuits thermiques sur des diélectriques à faible permittivité pour des applications Back-End-of-Line intermédiaire en vue d'une intégration 3D séquentielle. https://doi.org/10.70675/58e107c8ze6fbz49b0zae76z16fa77f946a7

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crossref · retrieved 2026-09-26T12:14:08.142Z