Etude expérimentale des mécanismes physico-chimiques de gravure des polymères dans les plasmas à base d'oxygène. Application aux procédés de gravure profonde

Alexandre Bès

Open source

DOI: 10.70675/f3a264f5zed1bz4014za8e6za217304a3b34
Published: Not recorded
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Publisher: Agence Bibliographique de l'Enseignement Supérieur
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.70675/f3a264f5zed1bz4014za8e6za217304a3b34,
  title = {Etude expérimentale des mécanismes physico-chimiques de gravure des polymères dans les plasmas à base d'oxygène. Application aux procédés de gravure profonde},
  author = {Alexandre Bès},
  doi = {10.70675/f3a264f5zed1bz4014za8e6za217304a3b34},
  url = {https://doi.org/10.70675/f3a264f5zed1bz4014za8e6za217304a3b34}
}

RIS

TY  - JOUR
TI  - Etude expérimentale des mécanismes physico-chimiques de gravure des polymères dans les plasmas à base d'oxygène. Application aux procédés de gravure profonde
AU  - Alexandre Bès
DO  - 10.70675/f3a264f5zed1bz4014za8e6za217304a3b34
UR  - https://doi.org/10.70675/f3a264f5zed1bz4014za8e6za217304a3b34
ER  -

APA

Bès, A. (n.d.). Etude expérimentale des mécanismes physico-chimiques de gravure des polymères dans les plasmas à base d'oxygène. Application aux procédés de gravure profonde. https://doi.org/10.70675/f3a264f5zed1bz4014za8e6za217304a3b34

Source records

crossref · retrieved 2026-09-26T06:13:10.768Z