Etude expérimentale des mécanismes physico-chimiques de gravure des polymères dans les plasmas à base d'oxygène. Application aux procédés de gravure profonde
- DOI
- 10.70675/f3a264f5zed1bz4014za8e6za217304a3b34
- Published
- 2014-12-19
- Container
- Not recorded
- Publisher
- Not recorded
- Open access
- yes
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limited evidence Score 45/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.
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Cite this work
BibTeX
@article{allodium:10.70675/f3a264f5zed1bz4014za8e6za217304a3b34,
title = {Etude expérimentale des mécanismes physico-chimiques de gravure des polymères dans les plasmas à base d'oxygène. Application aux procédés de gravure profonde},
author = {Alexandre Bès},
year = {2014},
doi = {10.70675/f3a264f5zed1bz4014za8e6za217304a3b34},
url = {https://doi.org/10.70675/f3a264f5zed1bz4014za8e6za217304a3b34}
}RIS
TY - JOUR TI - Etude expérimentale des mécanismes physico-chimiques de gravure des polymères dans les plasmas à base d'oxygène. Application aux procédés de gravure profonde AU - Alexandre Bès PY - 2014 DO - 10.70675/f3a264f5zed1bz4014za8e6za217304a3b34 UR - https://doi.org/10.70675/f3a264f5zed1bz4014za8e6za217304a3b34 ER -
APA
Bès, A. (2014). Etude expérimentale des mécanismes physico-chimiques de gravure des polymères dans les plasmas à base d'oxygène. Application aux procédés de gravure profonde. https://doi.org/10.70675/f3a264f5zed1bz4014za8e6za217304a3b34
Source records
- hal · retrieved 2026-11-10T17:58:19.900Z