セラミックスへの皮膜形成_スパッタ

Eijiro Maeda

DOI: 10.71947/arim.jpmxp1223nu0268
Published: 2026
Container: Not recorded
Publisher: Advanced Research Infrastructure for Materials and Nanotechnology in Japan(ARIM)
Open access: no

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Cite this work

BibTeX

@article{allodium:10.71947/arim.jpmxp1223nu0268,
  title = {セラミックスへの皮膜形成\_スパッタ},
  author = {Eijiro Maeda},
  year = {2026},
  doi = {10.71947/arim.jpmxp1223nu0268},
  url = {https://doi.org/10.71947/arim.jpmxp1223nu0268}
}

RIS

TY  - JOUR
TI  - セラミックスへの皮膜形成_スパッタ
AU  - Eijiro Maeda
PY  - 2026
DO  - 10.71947/arim.jpmxp1223nu0268
UR  - https://doi.org/10.71947/arim.jpmxp1223nu0268
ER  -

APA

Maeda, E. (2026). セラミックスへの皮膜形成_スパッタ. https://doi.org/10.71947/arim.jpmxp1223nu0268

Source records

datacite · retrieved 2026-09-27T10:50:49.407Z