Photolytic deposition of tungsten hexacarbonyl: CVD of W-based films with the assistant of UV beam in ultra-high vacuum condition
- Type
- Retraction
- Notice date
- 10/28/2020 0:00
- Journal
- Materials Research Express
- Publisher
- IOP Publishing
- Notice DOI
- 10.1088/2053-1591/abbc67
- Original paper DOI
- 10.1088/2053-1591/ab24fc