A new structure and modeling of a three-axis MEMS capacitive accelerometer with high dynamic range and sensitivity
- Type
- Retraction
- Notice date
- 2/8/2023 0:00
- Journal
- Microsystem Technologies
- Publisher
- Springer
- Notice DOI
- 10.1007/s00542-023-05423-y
- Original paper DOI
- 10.1007/s00542-020-04932-4