КРЕМНИЙ 2022: Тезисы докладов XIV Международной конференции и XIII Школы молодых ученых и специалистов по актуальным проблемам физики, материаловедения, технологии и диагностики кремния, нанометровых структур и приборов на его основе, Новосибирск, 26-30 сентября 2022 г.
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